Introduction to Microfabrication
Un libro in lingua di Sami Franssila edito da John Wiley & Sons Inc, 2010
- € 73,90
- Il prezzo è variabile in funzione del cambio della valuta d’origine
- Titolo del Libro in lingua: Introduction to Microfabrication
- Lingua: English
- Autore : Sami Franssila
- Editore: John Wiley & Sons Inc
- Data di Pubblicazione: 16 Novembre '10
- Genere: Technology and engineering Electronics Microelectronics
- ISBN-10: 0470749830
- ISBN-13: 9780470749838
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.
This second edition includes:
With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.